| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar type galvano-mirror which can obtain specific rotary torque in a movable plate with a small consumed current and improve the flatness of a reflecting mirror. SOLUTION: A semiconductor device has a circular flat plate type movable plate and a torsion bar, pivoting the movable plate on the semiconductor device in a swinging state, formed integrally in a hollow state and a circular plane coil is provided on the top surface of the movable plate and a reflecting mirror is provided on the reverse surface. The semiconductor device is mounted on a base substrate, and a sectorial or semicircular permanent magnet which is paired to exert a magnetic field on the circular plane coil is fixed to the internal wall of a yoke, which is arranged across the torsion bar. A pattern part provided on the base substrate and a pattern part formed on the semiconductor substrate are electrically connected to each other. |
