| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor for accurately measuring not only a displacement direction (for example, height direction) but also a position direction (for example, width direction) regardless of the distance from a head section, namely the distance from a light reception optical system. SOLUTION: In the displacement sensor having a light projection means for applying light whose section is straight onto an object to be measured at a specific angle, a light reception means for photographing a specific region including an illumination light image on the object to be measured from another angle using a two-dimensional image pickup element, and an operation means for obtaining displacement in the specific direction of the illumination light image position on the object to be measured based on an image obtained from the two-dimensional image pickup element included in the light reception means, information for position correction for indicating the relationship among a position on the object to be measured obtained from the image in the two-dimensional image pickup element, an actual position on the object to be measured, and the measurement displacement of the position, is stored.
|
