SHAPED TOP TERMINAL

摘要

Our wafer scale processing techniques produce chip-laser-diodes with a diffraction grating (30) that redirects output light out the top and/or bottom surfaces. Noise reflections are carefully controlled, allowing significant reduction of the signal fed to the active region (46). The improved method and structure use dry-etched shaping of at least one of an output-end of the top contact (24) and/or an output-end of the upper electrode (26). This shaping provides at least one of substantial elimination of: resonance producing reflection from the upper electrode output end (26), and light beam shaping. Preferably, both (24, 26) are shaped with one patterning.