| 摘要 |
PROBLEM TO BE SOLVED: To easily deposit a dense high polymeric thin film which has been polymerized in a stoichiometric compositional ratio, is effective as an electronic base material having stable characteristics, and has high purity and uniform film thickness, when two or more kinds of raw material monomers are evaporat ed in a vacuum chamber to deposit a high polymeric thin film on a substrate by polymerization reaction, in the case there is a difference in the vapor pres sure between the individual raw material monomers to be reacted, or in the case there is a difference in the evaporation temperature between the respective raw material monomers. SOLUTION: Two or more kinds of raw material monomers are respectively individually evaporated in a vacuum chamber to deposit a laminated film of the raw material monomers on a substrate. After that, the laminated film of the raw material monomers is heated and polymerized in a vacuum, or in the air, or in a gaseous atmosphere, so that an organic high polymeric thin film of a single layer or of a plurality of layers is deposited on the substrate.
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