| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the soiling of a laser beam introducing optical window. SOLUTION: A deposit protective member 22 for a laser beam introducing optical window 21 is placed between the window 21 and a target 32. This protective member 22 is equipped with a self-supporting film made of a fluorinated resin which has a transmissivity of 80% or higher for the ultraviolet ray having a wavelength of 190-260 nm at a thickness of 20μm. Desirably, a deposit protective plate 23 with an aperture 24 is installed between the deposit protective member 22 for the laser beam introducing optical window and the target 32. A laser beam with a wavelength of 260 nm or below is irradiated to the target 32 for laser abration, in an atmosphere containing at least one kind selected from a group consisting of O2 , O3 and nitrogen oxide (NOx), laser ablation is performed thereby to form a film on a substrate 33.</p> |
