PATTERN DEFECT CORRECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pattern defect correcting device which can be used effectively for a correction object having a large variety of pattern shapes like a photomask used in a manufacturing process of a shadow mask. SOLUTION: The pattern defect correcting device which exposes laser beam at a regulated exposure band to correct defects in a pattern, regulates exposure band in rectangle shape, and is equipped with a rectangle opening means to vary sizes of an X side and Y side and rotating angles of the rectangle, a circular opening means to regulate the exposure band in a circular shape, and a switching means to switch between the rectangle opening means and the circular opening means to apply for the regulation of the exposure band.