| 摘要 |
PROBLEM TO BE SOLVED: To additionally save energy, and to improve drive efficiency in a single-phase drive-type piezoelectric actuator having a piezoelectric element that is vibrated by applying a drive voltage and a piezoelectric element that is vibrated by transmitting the vibration of the piezoelectric element. SOLUTION: A phase shifter 19 is provided, and allows the phase of voltage that is generated in a second piezoelectric 100' to coincide with the phase of the driving voltage in a first piezoelectric element 100. Superimposition is made to the drive voltage that is supplied by a drive power supply 20 for supplying to the first piezoelectric element 100, thus reducing driving power to be supplied by the drive power supply 20, and hence saving the energy. |
