SEMICONDUCTOR WAFER AND MANUFACTURING METHOD THEREOF, AND MANUFACTURING METHOD OF SEMICONDUCTOR OPTICAL AMPLIFIER

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor wafer manufactured by a simplified device manufacturing process, a method of manufacturing a semiconductor wafer, and a method of manufacturing a semiconductor optical amplifier. SOLUTION: Light of different light intensities P is irradiated to a predetermined region at the same time from a time Ta before supplying a raw material gas (TMIn, TEG, AsH3 ) for growing a strain bulk active layer (In1-x Gax Asy P1-y ) to a time Tb after stopping the supply of the material gas to produce a local composition modulation, thereby forming a wafer having a desired amount of strain positively and widely.