| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor ensuring full safety, even in the case that a feed control means performs abnormal operations. SOLUTION: When a feed permission timer reset signal S1 is outputted from a feed control part, a feed permission timer 51 outputs a feed permission signal S4. Thus, a reset inhibition timer 52 outputs a reset inhibition signal S8 for a prescribed time. When the feed control part outputs a new feed permission timer reset signal S1 by abnormal operations during the prescribed time, a reset violation signal S9 is activated. As a result, a feed permission timer reset abnormality signal S5 is outputted from a flip-flop circuit 54. The flip-flop circuit 54 continuously outputs the feed permission timer reset abnormality signal S5, until an alarm cancellation signal S3 is inputted. When the feed permission timer reset abnormality signal S5 is outputted, the feed of processing liquid is stopped, regardless of the presence/absence of the output of the feed permission signal S4.
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