| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem where, in order to increase an output of a linear actuator, dimensions of a permanent magnet and dimensions of a coil part must be increased, so that dimensions of the linear actuator must be increased in order to increase a rigidity. SOLUTION: A stator has a moving table side stator with a plurality of pole rails. As a connection part 13 of a mover 11, which is connected with the moving table, moves between the pole rails of the moving table side stator, the connection part 13 between the mover 11 and the moving table can be positioned at a center of the mover 11. If propulsive forces generated in adjacent spaces are same, therefore, the mover can be balanced with respect to the connection part, so that a principle of a lever is not applied as in the case of a cantilever mover. In comparison with the cantilever mover, therefore, a force applied to the mover is small relatively to a propulsive force, so that it is not necessary to increase a rigidity of a mover supporting part and hence both dimensional reduction and a high output can be realized. |
