发明名称 DISK CARRIER
摘要 PROBLEM TO BE SOLVED: To provide a structure body which is for holding a disk during sputtering and is suited to the small size of a substrate. SOLUTION: A first disk carrier (200) is circular substantially and has such a size and shape as can be arranged within an opening part (104) provided at a second disk carrier (100) larger than this. In one execution form, this larger second disk carrier is a conventional disk carrier to be used for supporting the substrate during executing a magnetic disk manufacturing method. The first disk carrier is circular and has a diameter equal to (or substantially equal to) that of a normal substrate which is manufactured presently. Consequently, the first disk carrier is in the state of being fitted in the second disk carrier, and can be held by this. The first disk carrier has at least one opening parts (202-1, etc.), for holding at least one substrate the diameter of which is substantially smaller than the opening part of the second disk carrier.
申请公布号 JP2002280443(A) 申请公布日期 2002.09.27
申请号 JP20010368110 申请日期 2001.12.03
申请人 KOMAG INC 发明人 TEIN NGUYEN
分类号 C23C14/50;C23C14/56;G11B5/851;G11B17/22;H01L21/677;H01L21/683;(IPC1-7):H01L21/68 主分类号 C23C14/50
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