| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film which is improved in spontaneous polarization characteristics and degree of freedom of design and its manufacturing method. SOLUTION: A piezoelectric thin film 1 is composed of a board 2, a platinum thin film 4 formed thereon and preferentially oriented to (111), and a lead titanate zirconate thin film 5 formed thereon and preferentially oriented to (100). Or, the platinum thin film 4 is formed on the board 2 as preferentially oriented to (111), a first lead titanate zirconate thin film of thickness 20 to 200μm is formed thereon, and a second lead titanate zirconate thin film is formed thereon after thermal treatment has been carried out to form the piezoelectric thin film 1.</p> |
