发明名称 DIELECTRIC CAPACITOR AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a dielectric capacitor displaying a dielectric characteristic which exhibits little deterioration due to aging. SOLUTION: The dielectric capacitor is provided with a substrate, a lower electrode constituted of an iridium layer composed of columnar crystals formed on an insulated surface on the substrate and an iridium oxide layer formed between the columnar crystals by oxidizing the iridium layer, a dielectric layer which is formed on the lower electrode and which is constituted of a ferroelectric or a dielectric, having high permittivity and an upper electrode formed on the dielectric layer.
申请公布号 JP2002270792(A) 申请公布日期 2002.09.20
申请号 JP20020018643 申请日期 2002.01.28
申请人 ROHM CO LTD 发明人 NAKAMURA TAKASHI
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108 主分类号 H01L27/04
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