| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a movement guiding device that can guide the movements of moving bodies with high accuracy. SOLUTION: This movement guiding device is provided with an X-direction moving body 41 and Y-direction moving body 42, which are moved respectively in the orthogonal directions under guidance, arranged at vertically different positions, and restricted in the vertical direction and an X-Y moving body 3, which can be moved on a stool 11 in the moving directions of the moving bodies 42 and 43 under guidance. The guiding device is also provided with a vacuum vessel which houses the moving bodies 3, 41, and 42 and actuators 511, 512, 521 and 522, which respectively drive the moving bodies 3, 41, and 42 in the orthogonal directions and set up outside the vessel. The moving body 3 is driven in the orthogonal directions, by receiving forces from the lateral sideways of the moving bodies 41 and 42.</p> |
