OPTICAL BEAM GUIDE SYSTEM AND METHOD OF PREVENTING CONTAMINATION OF OPTICAL COMPONENTS CONTAINED IN SYSTEM

摘要

PROBLEM TO BE SOLVED: To prevent or at least reduce influences of contaminants in optical components of a beam guide system acting with use of UV in a novel and advantageous manner, without affecting the operation and/or beam guide quality of the beam guide system. SOLUTION: A method of reducing contamination of at least one optical component is contained in a beam guide space and held with a frame bounding the beam guide space and to an optical beam guide system. The surface of the frame defining the beam guide space is at least partly covered preferably with a degassed barrier layer not increasing the reflectivity. The method is utilizable e.g. in a lithography irradiation system acting with use of UV.