发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which is suitable for detecting neutrons, is small-sized and low in manufacturing cost, and to provide a method for manufacturing the same. SOLUTION: The semiconductor device comprises a boron-containing layer 4 containing an isotope<10> B and formed on a semiconductor substrate 1. In this device,αrays irradiated by reacting the neutrons irradiated towards the layer 4 with the isotope<10> B are made to plunge into the substrate 1, and an amount of the neutron is detected by electron/hole pairs 8 generated in the substrate.
申请公布号 JP2002270887(A) 申请公布日期 2002.09.20
申请号 JP20010070071 申请日期 2001.03.13
申请人 MITSUBISHI ELECTRIC CORP 发明人 INBE TAKAYUKI
分类号 G01T3/00;G01T3/08;H01L21/00;H01L27/148;H01L31/09;H01L31/115;H01L31/18;(IPC1-7):H01L31/09 主分类号 G01T3/00
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