| 摘要 |
PROBLEM TO BE SOLVED: To efficiently retrieve a database by making an engineer select and combine keywords for retrieving information about foreign matter and defect counter measures. SOLUTION: In a configuration provided with a database for cerebrating and storing the distribution of foreign matters and defects detected by an inspecting device, a keyword representing the characteristics of the foreign matter/defect distribution, a foreign matter/defect image picked up on the basis of inspection data, a keyword representing the characteristics of the foreign matter/defect image and the contents of foreign matter/detect measures with one another, a means for receiving the input of the keyword of the foreign matter/defect distribution and/or the keyword of the foreign matter/defect image by an operator and the input of a retrieval logical expression by a plurality of keywords, a means for retrieving the contents of the database according to an inputted retrieval condition and retrieving whether a corresponding past example exists, and a means for displaying retrieval results are provided.
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