| 摘要 |
PROBLEM TO BE SOLVED: To uniformly and efficiently remove a surface oxide film formed on a copper interconnection or the like, regarding a method and an apparatus the manufacturing a semiconductor device, where a process or a means used to remove an inessential substance adhering to the surface of an electrode or an interconnection using copper as the main material is provided. SOLUTION: The method of manufacturing the semiconductor device is provided with a cleaning process, in which the surface oxide film 6 formed on the copper interconnection 3, is cleaned and a first process, in which the film 6 is substituted into carboxylate and a second process, in which the generated carboxylate is reduced and removed.
|
