| 摘要 |
PROBLEM TO BE SOLVED: To provide an aperture grille of double structure for high precision and high minuteness, prevented from causing the deformation, disconnection or the like of a tape part even if plating thickness is made thin. SOLUTION: This aperture grille is manufactured from an aperture grille intermediate body obtained by a method of providing at least six plated layers on a conductor substrate provided on the surface with a plating resist layer of desired aperture grille shape including slit-like electron beam passage holes, forming the first layer and the intermediate layer of metal or an alloy with the same dissolution property, forming the second layer and the uppermost layer of iron or an iron alloy, and removing the resist layer and exfoliating it from the conductor substrate if necessary.
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