| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for patterning a transparent conductive tin oxide film in use for a touch panel, a plasma display panel, a liquid crystal display or a solar battery requiring transparent display electrodes, allowing simple and efficient formation of a patterned film of conductive tin oxide without using a resist film. SOLUTION: The method of patterning the conductive tin oxide film using a solution containing a tin compound and a dopant compound soluble in an organic solvent, dissolved in the organic solvent comprises drying a dry film within the range of retaining solubility in a developer, exposing it to a light containing a ultraviolet region to make it insoluble in part and etching a non- exposed portion with the developer. |
