| 摘要 |
A process for fabricating a polysilicon dual gate structure, featuring the use of a tungsten plug structure, used to alleviate the diode effect, present at the dopant interface in the polysilicon dual gate structure, has been developed. A first iteration of this invention places the tungsten plug, on a portion of a metal silicide layer, in a region directly overlying the dopant interface, (N type-P type regions), in the polysilicon dual gate structure. A second iteration of this invention places the tungsten plug directly on the dopant interface of the polysilicon dual gate structure, with the tungsten plug structure formed in a borderless opening, in an insulator layer. The use of the tungsten plug allows a less resistive current path through the polysilicon dual gate structure, when compared to counterparts fabricated without the tungsten plug structure, in which a more resistive current path, through a diode present at dopant interface, exists.
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