摘要 |
A thin film NTC thermistor having a thin film resistive element of a sputtered mixture of metal oxide film, the thin film resistant element having a negative temperature coefficient is disclosed. Another aspect of the present invention includes a product line of negative temperature coefficient thermistors having the same physical size, but varying value of resistances when at the same temperature. Another aspect of the invention includes a method of manufacturing a thin film negative temperature coefficient thermistor using thin film techniques.
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