发明名称 Method for thin film NTC thermistor
摘要 A thin film NTC thermistor having a thin film resistive element of a sputtered mixture of metal oxide film, the thin film resistant element having a negative temperature coefficient is disclosed. Another aspect of the present invention includes a product line of negative temperature coefficient thermistors having the same physical size, but varying value of resistances when at the same temperature. Another aspect of the invention includes a method of manufacturing a thin film negative temperature coefficient thermistor using thin film techniques.
申请公布号 US2002130758(A1) 申请公布日期 2002.09.19
申请号 US20010810206 申请日期 2001.03.16
申请人 KHAN JAVED 发明人 KHAN JAVED
分类号 C23C14/06;H01C7/04;H01C13/02;H01C17/075;H01C17/28;(IPC1-7):H01C13/00;H01C8/00 主分类号 C23C14/06
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