发明名称 |
PAD OF SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
PURPOSE: A pad of a semiconductor device and a method for fabricating the same are provided to prevent a damage of a passivation layer of the pad in a probing process of the pad of a wafer level test. CONSTITUTION: A pad(411) of a semiconductor device is formed with a conductive layer formed on a semiconductor substrate(401) and a passivation layer(421) formed on a part of the conductive layer. The conductive layer is formed with the first layer(441) and the second layer(431). The second layer(431) is formed on a rim of the first layer(441). The second layer(431) has a stepped portion higher than the stepped portion of the first layer(441). The passivation layer(421) is formed at the outside of the second layer(431). The conductive layer is formed by a metal. The passivation layer(421) is formed by an oxide layer. A conductive line is bonded on the first layer(441). |
申请公布号 |
KR20020072873(A) |
申请公布日期 |
2002.09.19 |
申请号 |
KR20010012898 |
申请日期 |
2001.03.13 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOI, JEONG UN;KIM, JEONG PYO |
分类号 |
H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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