Semiconductor integrated circuit manufacturing method and model parameter extracting method, apparatus, and program

摘要

A parameter extracting apparatus extracts the parameters of a circuit element model that represents a semiconductor element used for a circuit simulation. The apparatus has a specifying unit configured to specify an element structure and a physical model in the semiconductor element; a simulation unit configured to carry out local process and device simulations for parameters related to the specified element structure and physical model and calculate electric characteristics of the specified element structure; and a classification unit configured to classify the calculated electric characteristics according to bias conditions and element dimensions used in the simulations.