| 发明名称 |
Structure having laser ablated Features and method of fabricating |
| 摘要 |
Embedded flush circuitry features are provided by providing a conductive seed layer on the sidewalls and bottom of laser ablated trench features plating a layer of conductive metal onto the seed layer and depositing a layer of dielectric material.
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| 申请公布号 |
US2002129972(A1) |
申请公布日期 |
2002.09.19 |
| 申请号 |
US20010804921 |
申请日期 |
2001.03.13 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KONRAD JOHN JOSEPH;MCKEVENY JEFFREY;WILSON JAMES WARREN |
| 分类号 |
H05K3/00;H05K3/04;H05K3/10;H05K3/18;H05K3/38;H05K3/46;(IPC1-7):H05K1/09 |
主分类号 |
H05K3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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