GRINDING FILM FOR ULTRA-PRECISION PROCESSING AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a grinding film for ultra-precision processing used for grinding electronic components and optical components and for general specular polishing, especially appropriately used for grinding end faces of an optical fiber connector, and its manufacturing method. SOLUTION: In this grinding film 1 for ultra-precision processing having a base material film 2 and a grinding layer 4 formed on the film 2, the layer 4 containing grinding material grains 5 with a primary grain average grain size of 1-100 nm formed by grain growing method inside a binder resin 6 is formed. The grains 5 are preferably metallic oxides or metal compound oxides formed by vapor phase epitaxy method, liquid deposition method or solid phase growing method. The grains 5 are dispersed in a binder resin liquid for preparing a coating liquid and the coating liquid is applied on the film 2 for forming the grinding layer 4.