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发明名称
Formation and processing of porous semiconductors using etching solution of oxidant and fluorine-containing Lewis acid
摘要
申请公布号
GB2373367(A)
申请公布日期
2002.09.18
申请号
GB20000030232
申请日期
2000.12.12
申请人
* DE MONTFORT UNIVERSITY
发明人
ALEXANDER * PARBUKOV
分类号
C30B33/00;C30B33/10;H01L21/306;(IPC1-7):H01L21/306
主分类号
C30B33/00
代理机构
代理人
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