| 摘要 |
PROBLEM TO BE SOLVED: To reduce the thickness dispersion of a vibrating plate, reduce cost and improve reliability. SOLUTION: In the method of manufacturing this micro-actuator with the vibrating plate as a movable part, the vibrating plate is formed by forming a layer with a light element previously implanted in a silicon substrate, and after jointing the layer with the light element implanted in the silicon substrate, to a base substrate, heat treatment is applied to separate and transfer the layer with the light element implanted, to the base substrate to provide the micro- actuator with little thickness dispersion of the vibrating plate.
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