| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine machining device and a fine machining method allowing easy machining even to the interior of a closed region surrounded by a pattern of an insulator and free machining of a more complicated fine pattern in machining a machining pattern transformed into an insulator, on a conductive workpiece. SOLUTION: In this fine machining device or method, wherein voltage is applied between a conductive probe and the conductive workpiece to form the machining pattern transformed into the insulator, on the workpiece, has a machining condition computing means for computing a machining condition on the basis of data from a machining data input means and a machined data storage means, and the workpiece is machined on the basis of the machining condition computed by the machining condition computing means.
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