| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting the thickness of optical parts, by which the optical thickness of the optical parts is accurately adjusted to the order of submicron or smaller. SOLUTION: In order to satisfy a focusing condition as a solid immersion lens and to keep the focusing performance, i.e., to keep the shape of a point image on a focusing plane sufficiently small, the machining accuracy of the thickness of a convex-flat lens 11 needs be enhanced up to a level near to the size of the required point image. In case where the thickness of the solid immersion lens 11 which is manufactured by a conventional method is thinner than a target value, an adjustment part 12 is added by a vapor-deposition in order to decrease the shortage of the thickness. In the form of this embodiment, the convex-flat lens 11 is a machined synthetic quartz and the vapor-deposition material is SiO2 . Namely, the convex-flat lens 11 which is an optical member and the material which is vapor-deposited are composed of the same material. Thus, an incident light A is focused on the optical axis of a third optical plane 11c which is newly formed with the vapor-deposition material.
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