| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of well maintaining the electric connection to an electric device even in the case where the environment temperature varies. SOLUTION: The probe card is provided with a printed substrate having a plurality of electric fist transmission lines, a probe substrate having a plurality of electric second transmission lines connecting respectively to a plurality of the first transmission lines, arranged facing to the printed substrate and having a secondary thermal expansion coefficient smaller than a primary thermal expansion coefficient and a plurality of first contacts coming into contact with each of electrodes of the electric device.
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