发明名称 Method of forming copper interconnection utilizing aluminum capping film
摘要 A mostly copper-containing interconnect (126) overlies a semiconductor device substrate (100), and a transitional metallurgy structure (312, 508, 716, 806) that includes an aluminum-containing film (200, 506, 702, 802) contacts a portion of the mostly copper-containing interconnect. In one embodiment, the transitional metallurgy is formed over a portion of a bond pad (128). In an alternative embodiment, the transitional metallurgy includes an energy alterable fuse portion (710) that electrically contacts two conductive regions (712 and 714), and in yet another embodiment, the transitional metallurgy is formed over a copper-containing edge seal portion (809).
申请公布号 US6451681(B1) 申请公布日期 2002.09.17
申请号 US19990411266 申请日期 1999.10.04
申请人 MOTOROLA, INC. 发明人 GREER STUART E.
分类号 H01L21/60;H01L23/485;H01L23/525;H01L23/532;(IPC1-7):H01L21/44 主分类号 H01L21/60
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