发明名称 |
Capacitive microelectromechanical switches |
摘要 |
A microelectromechanical switch is disclosed comprising a conductor, a dielectric layer disposed on the conductor, a metal cap disposed on the dielectric layer and a bridge disposed proximate to the metal cap such that an electrical potential applied between the bridge and conductor causes the bridge to deform and contact the metal cap.
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申请公布号 |
US6452124(B1) |
申请公布日期 |
2002.09.17 |
申请号 |
US20010895105 |
申请日期 |
2001.06.28 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
YORK ROBERT A.;NAGRA AMIT S.;BORGIOLI ANDREA |
分类号 |
G02B6/35;H01H59/00;(IPC1-7):H01H57/00 |
主分类号 |
G02B6/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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