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发明名称
SiO2-coated mirror substrate for EUV
摘要
Mirror substrate consisting of crystal, especially silicon crystal, on which an amorphous layer, especially a quartz glass layer, is applied.
申请公布号
US6453005(B2)
申请公布日期
2002.09.17
申请号
US20010756018
申请日期
2001.01.05
申请人
CARL-ZE&IUML,SS-STIFTUNG
发明人
KAISER WINFRIED
分类号
G02B5/08;G21K1/06;(IPC1-7):G21K1/02
主分类号
G02B5/08
代理机构
代理人
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