| 发明名称 |
Illuminator for macro inspection, macro inspecting apparatus and macro inspecting method |
| 摘要 |
The inspecting apparatus according to the present invention includes an illuminator for emitting radiation onto a substrate having a surface on which a fine feature pattern is formed. Inspection for defects in the pattern is performed by visually inspecting radiation diffracted by the surface. The illuminator provides radiation including two different complementary colors.
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| 申请公布号 |
US6452671(B1) |
申请公布日期 |
2002.09.17 |
| 申请号 |
US20000698423 |
申请日期 |
2000.10.27 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
UDA MITSURU;YAMAGUCHI TSUYOSHI;SHINOHARA MASAMI |
| 分类号 |
G01B11/30;G01B11/24;G01N21/84;G01N21/956;H01L21/027;H01L21/66;(IPC1-7):G01N21/00 |
主分类号 |
G01B11/30 |
| 代理机构 |
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