| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact plasma processor at a low cost by which the pulse voltage of a high voltage/a high frequency is generated in a pulse generation circuit by a low input voltage. SOLUTION: In this plasma processor, a 2-stage type Marx circuit composed by connecting first and second impulse circuits C1 and C2 in multistages is used as the pulse generation circuit C. In the pulse generation circuit C, the pulse voltage generated by the first impulse circuit C1 and the pulse voltage generated by the second impulse circuit C2 are synchronously superimposed and the pulse voltage which is the double (pulse height value) of the pulse voltage generated by the first impulse circuit C1 is generated. Thus, the input voltage of the respective impulse circuits C1 and C2, that is the input voltage of the pulse generation circuit C, is reduced to about 1/2 of a conventional case, the cost of the plasma processor is lowered and it is compacted. |
