METHOD FOR MANUFACTURING SOLID STATE IMAGE PICK UP DEVICE

摘要

PURPOSE: A method for manufacturing solid state image pick up device is provided to improve a gathering efficiency by implanting gathering dopants. CONSTITUTION: A fabrication method of a solid state image pick up device comprises a first step for supplying a semiconductor substrate(10) for forming the solid state image pick up device on a first surface(10a) having the first surface(10a) and a second surface(10b) confronted with the first surface(10a), a second step for forming a polysilicon layer(12) including gathering dopants having a first density on the second surface(10b) of the semiconductor substrate(10) and the last step for condensing the gathering dopants having a first density into the remaining polysilicon layer(12) after decreasing the thickness of the polysilicon layer(12) including the gathering dopants.