发明名称 |
Electro-optical device and manufacturing method thereof |
摘要 |
To suppress the occurrence of a failure caused by static electricity in the manufacturing process of an active matrix type display device in which an active matrix circuit and peripheral drive circuits are integrated on a glass substrate, a protective capacitor to be connected to a short ring is formed using a semiconductor layer made from the. same material as the active layer of a thin film transistor present under the short ring. This protective capacitor has a function to absorb an electric pulse generated in the plasma using process. Discharge patterns are provided to prevent an electric pulse from affecting each circuit.
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申请公布号 |
US2002126231(A1) |
申请公布日期 |
2002.09.12 |
申请号 |
US20020133809 |
申请日期 |
2002.04.25 |
申请人 |
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发明人 |
ZHANG HONGYONG;TERAMOTO SATOSHI |
分类号 |
H01L29/786;G02F1/1362;H01L21/77;H01L21/84;H01L27/12;H01L27/13;(IPC1-7):G02F1/133 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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