Method of manufacturing electron-emitting device, electron source and image-forming apparatus, and apparatus of manufacturing electron source

摘要

The present invention provides a method of manufacturing an electron-emitting device, comprising a process for forming a pair of electric conductors spaced from each other on a substrate, and an activation process for forming a film of carbon or a carbon compound on at lease one of the pair of electric conductors, wherein the activation process is sequentially performed within plural containers having different atmospheres.