| 摘要 |
<p>The invention relates to an High Repetition Rate UV Excimer Laser (10), which includes a source of a laser beam and one or more windows (16, 18) which include magnesium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include magnesium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam.</p> |
