COMB PIEZOELECTRIC ACTUATOR, AND ITS MANUFACTURING METHOD

摘要

A method for simply manufacturing a comb piezoelectric actuator, in which little interlayer separation is caused even if the comb has a slit width of 70 mu m or less or slits of three-dimensional shape. A predetermined number of piezoelectric material green sheets (1) having electrode films (2) are prepared. The first green sheet (1a) is slitted with a punch (7) and die (8) around which a stripper (9) is arranged. The piezoelectric material green sheet (1a) is pulled up by the stripper (9) without pulling the punch (7) from the green sheet (1a). The second piezoelectric material green sheet (1b) is also slitted with the punch (7). Similarly without pulling the punch (7) from the green sheet (1b), these two piezoelectric green sheets (1a, 1b) are pulled up by the stripper (9) and they are stacked simultaneously with the punching. After the operation is repeated by a predetermined number of times, the green sheets are fired and formed into one body, thus fabricating a comb piezoelectric actuator having a stack of piezoelectric films.