| 摘要 |
<p>The probe array has a multiple of individual probes, which respectively have a probe tip (3a-3p) at one or more beams (4a,4b,4e,4f,5a,5b,5e,5f). The individual probes are arranged in the form of a two dimensional grating. The direction of the beams includes with both directions of the grating (a,b) an angle different from 0 or 180 degrees. The length of the beams (4a,4b,..) is greater than the grating distances of the grating. The beams are arranged at a common carrier structure (1) across distance pieces. The carrier structure is arranged in a plane, parallel to the plane of the beams.</p> |
