| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems that the cross section of a coil part tends to be reduced, consequently electric resistance of the coil cannot be adequately lowered, and an integration degree of the coil is hardly enhanced. SOLUTION: A method for manufacturing the coil for a charged particle beam apparatus is characterized by forming a metal layer on a substrate for an electrode, then applying resist of 0.1 mm or thicker, removing the resist of the region on which the coil should be formed, by lithography, and growing metal on the region in which the resist has been removed, by electrocasting.
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