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发明名称
Fabrication method for a semiconductor integrated circuit device including a field effect transistor, a capacitor and a resistor.
摘要
申请公布号
EP0682371(B1)
申请公布日期
2002.09.11
申请号
EP19950105966
申请日期
1995.04.21
申请人
NEC CORPORATION
发明人
YOSHIMORI, MASANORI
分类号
H01L27/04;H01L21/822;H01L21/8234;H01L27/06;(IPC1-7):H01L27/06
主分类号
H01L27/04
代理机构
代理人
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