| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide for obtaining a waveguide characteristic which meets a design value. SOLUTION: A pattern-shaped groove 4 is formed in an optical circuit and, then, the pattern 7a of a grinding barrier layer 7 is formed on surfaces except the groove 4. When a core glass film 5 formed on the grinding barrier layer 7a is ground, as the grinding end time point of the core glass film 5, the time point when a quartz substrate 1 where the pattern 7a and the groove 4 are formed or a lower clad glass layer 8a is exposed is adopted so that the grinding end time point is made to be distinct. As a result, the core glass film 5 is subjected to just enough grinding so as to obtain the optical waveguide provided with the desired waveguide cahracteristic. |
