发明名称 |
THREE-DIMENSIONAL SHAPE MEASURING DEVICE BY PHASE SHIFT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device capable of measuring the three-dimensional shape of an object surface having a large area highly accurately at high speed by using a phase shift method. SOLUTION: Line illumination 4 having a sine wave-shaped intensity distribution is projected in the axial direction of an inspection object 3 by using an illumination unit 2. The place where the sine wave-shaped line illumination 4 is projected on the inspection object 3 is imaged by using a line sensor camera 1 having pixels arranged in the axial direction of the inspection object 3. The whole surface of the inspection object 3 is imaged by rotating the inspection object 3 by an inspection object driving motor 5, and the three-dimensional shape of the inspection object 3 is measured by the phase shift method.
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申请公布号 |
JP2002257528(A) |
申请公布日期 |
2002.09.11 |
申请号 |
JP20010059053 |
申请日期 |
2001.03.02 |
申请人 |
RICOH CO LTD |
发明人 |
SAKIDA RYUJI;KAMATA TERUMI |
分类号 |
G01B11/25;G01B11/24;G06T1/00;(IPC1-7):G01B11/25 |
主分类号 |
G01B11/25 |
代理机构 |
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代理人 |
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地址 |
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