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经营范围
发明名称
Susceptor for vapor deposition
摘要
申请公布号
EP0629716(B1)
申请公布日期
2002.09.11
申请号
EP19940303718
申请日期
1994.05.24
申请人
APPLIED MATERIALS, INC.
发明人
ARUGA, MICHIO;OHKURA, ATSUNOBU;SAITO, AKIHIKO;ANAN, KATSUMASA
分类号
C23C16/458;(IPC1-7):C23C16/44;C23C14/50
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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