发明名称 |
Substrate transfer device and operating method thereof |
摘要 |
A substrate body transfer apparatus, and an operating method therefor, capable of inserting and extracting substrate body into and from a cassette using air conveyance without employing a transfer mechanism such as those in which direct contact is made with the substrate body when inserting or extracting a thin plate-shaped substrate body into or from a cassette. The substrate body transfer apparatus is employed when thin plate-shaped substrate body are extracted from or inserted into cassettes which store the substrate body. The substrate body transfer apparatus includes an air conveyance hand which is provided with a plurality of gas nozzles at the conveyance surface which opposes the rear surface of the substrate body and which has the function of conducting the flotation or grounding of the substrate body, the catching or launch of the substrate body, or the centering of the substrate body; and a cassette platform which has a unitary structure comprising a cassette platform seat on which the cassette is placed and which is provided with a mechanism for horizontally advancing and retracting the cassette with respect to the air conveyance hand, and a mechanism for raising and lowering the cassette platform seat at a predetermined pitch.
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申请公布号 |
US6447217(B1) |
申请公布日期 |
2002.09.10 |
申请号 |
US20010720764 |
申请日期 |
2001.03.26 |
申请人 |
TODA MASAYUKI;KABUSHIKI KAISHA WATANABE SHOKO |
发明人 |
TODA MASAYUKI;KUSUHARA MASAKI;UMEDA MASARU;YAGAI MICHIO |
分类号 |
B65G49/07;B25J15/06;G03F7/20;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):B65G53/16 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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