发明名称 Method of inspecting semiconductor chip with projecting electrodes for defects
摘要 A method of inspecting a semiconductor chip with projecting electrodes includes arranging, on a semiconductor chip having a peripheral edge with four corners, electrode terminals for detecting formation of projecting electrodes along the four corners of the peripheral edge of the semiconductor chip; measuring an electrical characteristic of each of the electrode terminals; and identifying the semiconductor chip as defective in terms of the projecting electrodes if the measured electrical characteristic does not conform to a desired characteristic.
申请公布号 US6448783(B1) 申请公布日期 2002.09.10
申请号 US20000642007 申请日期 2000.08.21
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 FUKUDA KAZUYOSHI
分类号 G01R31/26;G01R31/02;H01L21/66;H01L23/544;(IPC1-7):H01H31/02 主分类号 G01R31/26
代理机构 代理人
主权项
地址