发明名称 |
Method of inspecting semiconductor chip with projecting electrodes for defects |
摘要 |
A method of inspecting a semiconductor chip with projecting electrodes includes arranging, on a semiconductor chip having a peripheral edge with four corners, electrode terminals for detecting formation of projecting electrodes along the four corners of the peripheral edge of the semiconductor chip; measuring an electrical characteristic of each of the electrode terminals; and identifying the semiconductor chip as defective in terms of the projecting electrodes if the measured electrical characteristic does not conform to a desired characteristic.
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申请公布号 |
US6448783(B1) |
申请公布日期 |
2002.09.10 |
申请号 |
US20000642007 |
申请日期 |
2000.08.21 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
FUKUDA KAZUYOSHI |
分类号 |
G01R31/26;G01R31/02;H01L21/66;H01L23/544;(IPC1-7):H01H31/02 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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