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摘要
申请公布号
JP3323928(B2)
申请公布日期
2002.09.09
申请号
JP19970243224
申请日期
1997.09.08
申请人
发明人
分类号
H05H1/46;C23C16/50;C23C16/509;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
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